First Batch of Wafers in Jiufengshan Laboratory Offline, Achieving Breakthrough in High-precision Prating Chips

On March 19, 2023, the 8-inch pilot line of the Jiufengshan Laboratory Technology Center was officially put into operation, and the first batch of wafers (high-precision gratings) were successfully off-line. This also marks the laboratory’s 8-inch 0.15 μ The full line of equipment and processes for technology nodes above m has been completed, filling the gap in domestic production processes for high linear density, ultra-high refractive index, and aperiodic high-precision gratings.

Introducing the bonding process to bring the first batch of wafers off the production line in advance
Since the first equipment was moved in November 2022, the Jiufengshan Laboratory process platform has been working hard to move in and debug the equipment. In March 2023, the 8-inch line was completed and the first batch of wafers were brought off the line.
Compared to conventional products, the biggest technological difficulty of high-precision gratings lies in the particularity of their glass substrates: transparent substrates cause the machine to be unable to find edges and center, sensitivity to thermal processing leads to warpage, poor mechanical performance, vulnerability to breakage, and high requirements for rear surface cleanliness. On the basis of thorough research and a large number of validation tests, and in combination with the existing process equipment capabilities, the team of the laboratory process center has continuously solved over ten key process issues in two weeks, such as uneven lithography exposure surface, large slope angle of insufficient etching topography, low refractive index of the thin film layer, and thinning edge fragments of the substrate, and boldly introduced technical solutions for temporary bonding processes, Systematically solves various technological problems in the manufacturing process of glass substrates, realizes early production, and opens up a new path for significantly improving the yield of such products.
The smooth opening of the 8-inch pilot line and the first batch of wafers off the production line mark that the Jiufengshan Laboratory Technology Center has initially provided 8-inch 0.15 μ More than m technical node equipment and process lamination capabilities have filled the gap in domestic production processes for high linear density, ultra-high refractive index, and aperiodic high-precision gratings.
Entering the full operation period, the laboratory accelerated its departure
The construction began in August 2021, the first equipment was officially moved in November 2022, and the 8-inch pilot line was officially put into operation in March 2023. Within less than two years, the Jiufengshan Laboratory completed the construction phase of the high-speed project and entered the full operation period.